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We converted the diagnostic data from the thermal anneal into temperatures and generated temperature plots. These data are compared to the temperature curves from previous anneals. See the writeup for MIPS-2050 for details. This was our first campaign using new anneal currents, so the temperature curves are quite a bit different from what we have seen in earlier campaigns.
A Vrst analysis was performed on the Vrst data. In this test, the bias voltages for the 70um and 160um arrays are set to 0 mV, and then the Vrst voltages are adjusted between +5 mV and -5 mV relative to normal. A bright stim is turned on in manual mode during the test. The principle is that the array will produce a strong positive slope when positively biased and a strong negative slope when negatively biased, so the zero bias voltage point can be easily recognized. In practice, we calculate slope images and then look for this transition point.
The temperature plots can be seen in the writeup for MIPS-2050. The temperature behavior was as expected for the new anneal currents.
All Vrst data were analyzed using mips_sloper and IDL routines. The
results are presented in the writeup for metatask MIPS-2075.
Conclusions
The thermal behavior of the arrays looks very good. The Vrst behavior is
consistent with other data collected since we started performing proper
Ge anneals. No Vrst changes are recommended at this time.
Output and Deliverable Products
None.
Actions Following Analysis
None.