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Task Outcome Summary


Abstract

In this task, diagnostic data is collected during 160um, 70um, and 24um thermal anneals. The anneals executed properly. The temperature plots from these anneals are presented in the report for metatask MIPS-2050. Following the anneals, a Vrst optimization is performed on the Ge arrays. The results are presented below.

Analysis

We converted the diagnostic data from the thermal anneal into temperatures and generated temperature plots. These data are compared to the temperature curves from previous anneals. See the writeup for MIPS-2050 for details. This was our first campaign using new anneal currents, so the temperature curves are quite a bit different from what we have seen in earlier campaigns.

A Vrst analysis was performed on the Vrst data. In this test, the bias voltages for the 70um and 160um arrays are set to 0 mV, and then the Vrst voltages are adjusted between +5 mV and -5 mV relative to normal. A bright stim is turned on in manual mode during the test. The principle is that the array will produce a strong positive slope when positively biased and a strong negative slope when negatively biased, so the zero bias voltage point can be easily recognized. In practice, we calculate slope images and then look for this transition point.


Results

Temperature Plots from Anneal

The temperature plots can be seen in the writeup for MIPS-2050. The temperature behavior was as expected for the new anneal currents.

Vrst Optimization

All Vrst data were analyzed using mips_sloper and IDL routines. The results are presented in the writeup for metatask MIPS-2075.

Conclusions

The thermal behavior of the arrays looks very good. The Vrst behavior is consistent with other data collected since we started performing proper Ge anneals. No Vrst changes are recommended at this time.

Output and Deliverable Products

None.

Actions Following Analysis

None.